Universities

Technical University of Munich (TUM) –

known for engineering, computer science, and natural sciences.
(Master of Science in Electrical Engineering, Master of Science in Robotics, Cognition, and Intelligence, Master of Science in Management and Technology)

Ludwig Maximilian University of Munich (LMU) –

known for medicine, law, economics, and social sciences.
(Master of Science in Computer Science, Master of Business Administration, Master of Science in Physics)

Heidelberg University –

known for medicine, natural sciences, and humanities.
(Master of Science in Molecular Biosciences, Master of Engineering in Environmental Engineering, Master of Science in Computational Linguistics, Master of Science in Applied Computer Science)

Humboldt University of Berlin –

is known for social sciences, humanities, and law. (Master of Science in Computer Science, Master of Science in Biotechnology, Master of Science in Physics)

Free University of Berlin –

known for social sciences, humanities, and law.
(Master of Science in Computer Science, Master of Science in Physics, Master of Science in Materials Science)

University of Freiburg –

known for medicine, natural sciences, and humanities. (Master of Science in Microsystems Engineering, Master of Science in Renewable Energy Engineering and Management, Master of Science in Computer Science)

RWTH Aachen University –

known for engineering, computer science, and natural sciences.
(Master of Science in Electrical Engineering, Information Technology, and Computer Engineering, Master of Science in Mechanical Engineering, Master of Science in Chemical Engineering, Master of Science in Computer Science)

University of Hamburg –

known for social sciences, economics, and law.
(Master of Science in Computer Science, Master of Science in Chemistry, Master of Science in Earth Sciences, Master of Science in Environmental Sciences)

University of Cologne –

known for business, economics, and law.
(Master of Science in Chemistry, Master of Science in Biological Sciences, Master of Science in Geophysics, Master of Science in Information Systems)

Technical University of Berlin –

known for engineering, computer science, and natural sciences.
(Master of Science in Electrical Engineering and Computer Science, Master of Science in Mechanical Engineering, Master of Science in Chemical and Process Engineering, Master of Science in Computer Science)

Please note that these are not exhaustive German Universities lists, and each university has many excellent programs in other fields as well.